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Encyclopedia of Laser Physics and Technology

Optical Metrology

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Definition: the science and technology of performing measurements with light

Optical metrology is the science and technology concerning measurements with light. Such measurements can either target properties of light itself or other properties such as some distance.

Some examples for optical metrology are:

In many cases, optical metrology can be extremely precise and is finally limited by laser noise.

See also: frequency metrology, interferometers, distance measurements with lasers, laser noise

Category: metrology

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