RP Photonics

Buyer's Guide … the one with the Encyclopedia!

Where to Buy Laser Lithography

Definition: a technique where microscopic structures are generated with laser light

Related products: laser material processing

5 suppliers for laser lithography are listed in the RP Photonics Buyer's Guide. Both manufacturers and distributors can be registered.

Suppliers with Ad Package
CompanyProduct Description

All wavelengths.

TOPTICA Photonics AG

Lochhamer Schlag 19
82166 Gräfelfing
Germany

Quality: ISO 9001:2015
www.toptica.com
Social: Facebook, LinkedIn, YouTube
E-mail:
Tel.: +49 89 85 83 70
Fax: +49 89 85 83 72 00

Photolithography is a microfabrication technique that is commonly used to pattern parts of a thin film or the bulk of a substrate. It is also often termed as optical lithography or UV lithography, if ultraviolett wavelengths are used.

The techninque uses light to transfer a geometric pattern from a photomask onto a light-sensitive chemical ("photoresist" or "resist") on the substrate. This first irradiation step is followed by a series of chemical treatments that either engrave the exposed pattern into the material underneath the photo resist, or it enables deposition of a new material in the desired pattern on top of it.

The optical lens system of photolithography setups is usually very complex and is inspected during the manufacturing process with coherent cw laser light of the same wavelength as the excimer lasers, i.e. 193 or 248 nm. Since excimer lasers have insufficient coherence, other lasers are used for this inspection, e.g. frequency-stabilized and frequency-converted diode lasers.

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From your country:

Heidelberg Instruments Inc.

2539 W 237th St Suite A
Torrance, CA 90505
United States
www.himt.de
E-mail:
Tel.: +1 (781) 287 9758

Quantum Design, Inc.

6325 Lusk Boulevard
San Diego, CA 92121
United States
www.qdusa.com
Tel.: +1 858 481 4400
Fax: +1 858 481 7410
Outside America:

Nanoscribe GmbH

Hermann-von-Helmholtz-Platz 1
76344 Eggenstein-Leopoldshafen
Germany
www.nanoscribe.de/en
Tel.: +49 721 60 82 88 40
Fax: +49 721 60 82 88 48

Raymax Lasers

37/5 Ponderosa Parade
Warriewood NSW 2102
Australia
www.raymax.com.au
Tel.: +61 2 9979 7646
Fax: +61 2 9979 8207

All wavelengths.

TOPTICA Photonics AG

Lochhamer Schlag 19
82166 Gräfelfing
Germany

Quality: ISO 9001:2015
www.toptica.com
Social: Facebook, LinkedIn, YouTube
E-mail:
Tel.: +49 89 85 83 70
Fax: +49 89 85 83 72 00

Photolithography is a microfabrication technique that is commonly used to pattern parts of a thin film or the bulk of a substrate. It is also often termed as optical lithography or UV lithography, if ultraviolett wavelengths are used.

The techninque uses light to transfer a geometric pattern from a photomask onto a light-sensitive chemical ("photoresist" or "resist") on the substrate. This first irradiation step is followed by a series of chemical treatments that either engrave the exposed pattern into the material underneath the photo resist, or it enables deposition of a new material in the desired pattern on top of it.

The optical lens system of photolithography setups is usually very complex and is inspected during the manufacturing process with coherent cw laser light of the same wavelength as the excimer lasers, i.e. 193 or 248 nm. Since excimer lasers have insufficient coherence, other lasers are used for this inspection, e.g. frequency-stabilized and frequency-converted diode lasers.

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