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Where to Buy Laser Lithography Equipment

Laser lithography is used for producing very fine structures, for example in the fabrication of computer chips. For highest resolution, laser sources with very short wavelength (in the ultraviolet) are required.

More general products: laser material processing machinery

Related product categories: manufacturing equipment, applications

ERelated encyclopedia article: laser material processing

7 suppliers for laser lithography equipment are listed in the RP Photonics Buyer's Guide. Both manufacturers and distributors can be registered.

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CompanyProduct Description

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TOPTICA Photonics AG

Lochhamer Schlag 19
82166 Gräfelfing
Germany
web link www.toptica.com

E-mail:
(See the company profile page for additional contact information.)
ISO 9001:2015
laser lithography equipment

Photolithography is a microfabrication technique that is commonly used to pattern parts of a thin film or the bulk of a substrate. It is also often termed as optical lithography or UV lithography, if ultraviolett wavelengths are used.

The technique uses light to transfer a geometric pattern from a photomask onto a light-sensitive chemical ("photoresist" or "resist") on the substrate. This first irradiation step is followed by a series of chemical treatments that either engrave the exposed pattern into the material underneath the photoresist, or it enables deposition of a new material in the desired pattern on top of it.

The optical lens system of photolithography setups is usually very complex and is inspected during the manufacturing process with coherent cw laser light of the same wavelength as the excimer lasers, i.e. 193 or 248 nm. Since excimer lasers have insufficient coherence, other lasers are used for this inspection, e.g. frequency-stabilized and frequency-converted diode lasers.

The TopWave 266 is ideal for sophisticated measurement and production tasks in e.g. semiconductor inspection, lithography or Raman spectroscopy. It is a cost-effective and reliable laser that enables the user to concentrate on their application rather than worrying about the light source.


See us at Frontiers in Optics + Laser Science in Tacoma, Washington, USA, Oct. 08–12 (booth 401)!

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All Suppliers
From your country:

Heidelberg Instruments Inc.

2539 W 237th St Suite A
Torrance, CA 90505
United States
www.himt.de
E-mail:

Quantum Design, Inc.

6325 Lusk Boulevard
San Diego, CA 92121
United States
Outside America:

Nanoscribe GmbH

Hermann-von-Helmholtz-Platz 6
76344 Eggenstein-Leopoldshafen
Germany
www.nanoscribe.de
E-mail:

Nikon Corporation

Shinagawa Intercity Tower C
2–15–3, Konan, Minato-ku
Tokyo 108–6290
Japan

Raymax Lasers

37/5 Ponderosa Parade
Warriewood NSW 2102
Australia

SIMTRUM Pte. Ltd.

Blk 71, #06–03, Ayer Rajah Crescent
Singapore 139955

All wavelengths.

TOPTICA Photonics AG

Lochhamer Schlag 19
82166 Gräfelfing
Germany
web link www.toptica.com

E-mail:
(See the company profile page for additional contact information.)
ISO 9001:2015
laser lithography equipment

Photolithography is a microfabrication technique that is commonly used to pattern parts of a thin film or the bulk of a substrate. It is also often termed as optical lithography or UV lithography, if ultraviolett wavelengths are used.

The technique uses light to transfer a geometric pattern from a photomask onto a light-sensitive chemical ("photoresist" or "resist") on the substrate. This first irradiation step is followed by a series of chemical treatments that either engrave the exposed pattern into the material underneath the photoresist, or it enables deposition of a new material in the desired pattern on top of it.

The optical lens system of photolithography setups is usually very complex and is inspected during the manufacturing process with coherent cw laser light of the same wavelength as the excimer lasers, i.e. 193 or 248 nm. Since excimer lasers have insufficient coherence, other lasers are used for this inspection, e.g. frequency-stabilized and frequency-converted diode lasers.

The TopWave 266 is ideal for sophisticated measurement and production tasks in e.g. semiconductor inspection, lithography or Raman spectroscopy. It is a cost-effective and reliable laser that enables the user to concentrate on their application rather than worrying about the light source.


See us at Frontiers in Optics + Laser Science in Tacoma, Washington, USA, Oct. 08–12 (booth 401)!

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