Buyer's Guide … the one with the Encyclopedia!

Where to Buy Laser Lithography Equipment

Laser lithography is used for producing very fine structures, for example in the fabrication of computer chips. For highest resolution, laser sources with very short wavelength (in the ultraviolet) are required.

More general products: laser material processing machinery

Related product category: applications

ERelated encyclopedia article: laser material processing

6 suppliers for laser lithography equipment are listed in the RP Photonics Buyer's Guide. Both manufacturers and distributors can be registered.

For making a list of those suppliers which you want to check more closely, first mark all suitable ones by clicking on the entries (making their background light gray). Then click on this button:

For documenting your supplier search, you may then print this page on paper or into a PDF document.

Suppliers with Ad Package
presenting their product descriptions
CompanyProduct Description

All wavelengths.

TOPTICA Photonics AG

Lochhamer Schlag 19
82166 Gräfelfing
Germany
www.toptica.com

E-mail:
(See the company profile page for additional contact information.)
laser lithography equipment

Photolithography is a microfabrication technique that is commonly used to pattern parts of a thin film or the bulk of a substrate. It is also often termed as optical lithography or UV lithography, if ultraviolett wavelengths are used.

The techninque uses light to transfer a geometric pattern from a photomask onto a light-sensitive chemical ("photoresist" or "resist") on the substrate. This first irradiation step is followed by a series of chemical treatments that either engrave the exposed pattern into the material underneath the photoresist, or it enables deposition of a new material in the desired pattern on top of it.

The optical lens system of photolithography setups is usually very complex and is inspected during the manufacturing process with coherent cw laser light of the same wavelength as the excimer lasers, i.e. 193 or 248 nm. Since excimer lasers have insufficient coherence, other lasers are used for this inspection, e.g. frequency-stabilized and frequency-converted diode lasers.

The TopWave 266 is ideal for sophisticated measurement and production tasks in e.g. semicon inspection, lithography or Raman spectroscopy. It is a cost-effective and reliable laser that enables the user to concentrate on their application rather than worrying about the light source.

Your company's products are not listed here? Get our ad package to enjoy that and many other benefits!
All Suppliers
From your country:

Heidelberg Instruments Inc.

2539 W 237th St Suite A
Torrance, CA 90505
United States
www.himt.de
E-mail:

Quantum Design, Inc.

6325 Lusk Boulevard
San Diego, CA 92121
United States
Outside America:

Nanoscribe GmbH

Hermann-von-Helmholtz-Platz 6
76344 Eggenstein-Leopoldshafen
Germany
www.nanoscribe.de
E-mail:

Nikon Corporation

Shinagawa Intercity Tower C
2–15–3, Konan, Minato-ku
Tokyo 108–6290
Japan

Raymax Lasers

37/5 Ponderosa Parade
Warriewood NSW 2102
Australia

All wavelengths.

TOPTICA Photonics AG

Lochhamer Schlag 19
82166 Gräfelfing
Germany
www.toptica.com

E-mail:
(See the company profile page for additional contact information.)
laser lithography equipment

Photolithography is a microfabrication technique that is commonly used to pattern parts of a thin film or the bulk of a substrate. It is also often termed as optical lithography or UV lithography, if ultraviolett wavelengths are used.

The techninque uses light to transfer a geometric pattern from a photomask onto a light-sensitive chemical ("photoresist" or "resist") on the substrate. This first irradiation step is followed by a series of chemical treatments that either engrave the exposed pattern into the material underneath the photoresist, or it enables deposition of a new material in the desired pattern on top of it.

The optical lens system of photolithography setups is usually very complex and is inspected during the manufacturing process with coherent cw laser light of the same wavelength as the excimer lasers, i.e. 193 or 248 nm. Since excimer lasers have insufficient coherence, other lasers are used for this inspection, e.g. frequency-stabilized and frequency-converted diode lasers.

The TopWave 266 is ideal for sophisticated measurement and production tasks in e.g. semicon inspection, lithography or Raman spectroscopy. It is a cost-effective and reliable laser that enables the user to concentrate on their application rather than worrying about the light source.

Click on a company entry to mark it.

Product entries of suppliers having an ad package are displayed with a logo, product description and product image.

Users: if any displayed information is incorrect (e.g., a listed supplier does not offer such products) or legally problematic, please notify RP Photonics so that the problem can be solved.

Suppliers: you can report modified data using a form, which is provided via the button "Edit profile data" on your company profile page. You can obtain our ad package for getting a much improved visibility and many more leads. (Tell your marketing people about it!)

Report additional suppliers for these products!
Report Additional Suppliers for These Products

If you are a supplier and want to be listed, please use the registration form.

An already registered supplier can use a customized form to report the full list of offered photonics products. That form is reachable with a link at the bottom of the supplier's profile page.

Anyone, not only suppliers themselves, can report additional suppliers. If possible, please provide a web address showing that this supplier indeed offers such products.

Company:
URL:
Comments:
Prove that you are a human being: What is 7 + 5?