SmarAct

The PICOSCALE Vibrometer is a turnkey solution for measuring the vibrations of micromechanical structures with sizes ranging from a few µm to several cm. Applications include the testing of MEMS, sensors, miniature loudspeakers, but also bearings and actuators. As the device is equipped with an integrated microscope and can measure up to 1 million pixels, it is ideal for visualizing vibration modes with high spatial and temporal resolution.

The PICOSCALE Interferometer is our solution for making non-contact displacement measurements with picometer resolution and sub-nanometer noise levels. It features compact, passive optical sensor heads, which can be made UHV and cryo compatible. Custom optical designs are available, and the device can be tailored for tabletop laboratory usage or OEM integration.

METIRIO is a high-precision optical encoder designed and manufactured for closed-loop nanopositioning to achieve maximum miniaturisation, high resolution and speed. With a readhead volume of just 6.6 × 5.1 × 1.7 mm, it is one of the smallest encoders available, and can achieve resolution of less than one nanometer. The readhead is available unmounted, or on a standard or flexible PCB. Fully packaged and connectorized designs are available, and can be made UHV compatible or fully custom.